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Furnace Equipment Engineer/Senior

Technical Expertise (Furnace)

  • Strong knowledge of furnace systems (Qtz tube, boat, SiC, TC, SCR, rapid cooling radiator)

  • Understanding of thermal processes (annealing, oxidation, diffusion, thermal budget)

  • Tool to tool matching capability (TC wafer to match temperature reference with ISO standard, golden pressure gauge...etc)

  • Hands on flat zone tuning, profiling adjustment, tube change, heater change, rapid cooling system change....etc)

Equipment Performance & Reliability

  • Perform preventive maintenance (PM) and corrective maintenance (CM)

  • Troubleshoot equipment failures and minimize downtime

  • Ensure machines meet operational and safety standards

  • Manage spare parts and critical component tracking

  • Balance PM tool time with manufacturing

  • May require on-call support for critical situation

Process Support & Optimization

  • Support production by ensuring stable processes

  • Work closely with process engineers to optimize tool parameters

  • Monitor tool performance using SPC (Statistical Process Control)

  • Drive improvements in yield and defect reduction

Troubleshooting & Problem Solving

  • Conduct root cause analysis (RCA) for equipment and process issues

  • Apply structured problem-solving methods (e.g., 8D, Fishbone, FMEA)

  • Implement corrective actions and preventive actions (CAPA)

Continuous Improvement

  • Lead or participate in productivity and cost-reduction projects

  • Improve Mean Time Between Failures (MTBF) and Mean Time To Repair (MTTR)

  • Enhance equipment efficiency and automation

Installation & Qualification

  • Support new equipment installation, setup, and acceptance (SAT/FAT)

  • Perform equipment qualification and process buy-off

  • Collaborate with vendors for upgrades and modifications

Documentation & Reporting

  • Maintain accurate maintenance records and technical documentation

  • Prepare reports on equipment performance, downtime, and improvements

  • Update SOPs and work instructions

Safety & Sustainability

  • Ensure compliance with fab safety protocols and cleanroom standards

  • Handle high-voltage systems, vacuum systems, and hazardous gases safely

  • Balance equipment sustainability vs needs

Key Performance Indicators

  • Equipment uptime (%)

  • OEE

  • Yield impact

  • PM compliance rate

  • FDC trigger rate

Soft Skills

  • Strong analytical and problem-solving skills

  • Ability to work under pressure in a high-volume manufacturing environment

  • Good communication and teamwork

  • Proactive and self-driven mindset

  • Utilizing goggle office & Gemini AI

See also

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