Process Engineer (Litho)
Job Objectives
To develop, optimize, and sustain photolithography processes for optoelectronic and photonic compound semiconductor wafer fabrication, ensuring process stability, yield, and quality in support of the company technology and product roadmap, while providing technical guidance to junior engineers and production staff.
Duties and Responsibilities
- Develop, optimize, and qualify photolithography process steps (coat, expose, develop, bake) for compound semiconductor wafer fabrication.
- Own and monitor lithography-related FAB quality indices, including Line Yield, critical dimension (CD) control, overlay accuracy, and Statistical Process Control (SPC).
- Lead troubleshooting of lithography-related process excursions and drive root cause analysis and corrective/preventive actions (8D/CAPA).
- Manage process design documentation, process change control records, and mask/reticle specifications for lithography process steps.
- Lead new lithography process development and qualification activities for NPI/NPD projects, including evaluation of new photoresists, materials, and process recipes.
- Collaborate with Equipment, Yield, and Operations teams to ensure processes meet schedule, yield, and quality targets.
- Drive continuous improvement initiatives aligned with LEAN methodology.
- Set up and maintain control documentation and SPC records for lithography processes; train and guide technicians and operators.
- Support the evaluation and qualification of new lithography equipment, tools, or outsourced FAB vendors.
- Prepare technical reports on analyses, findings, and project updates for management.
- Stay current with lithography process technologies and participate in knowledge-sharing activities.
- Participate in special projects or task forces as assigned.
- Perform other reasonable duties as assigned.
Qualification Guidelines
- Bachelor Degree in Electrical Engineering, Materials Science, Applied Physics, Chemical Engineering, or a related discipline
- Minimum 5 years of relevant experience in photolithography process engineering within a semiconductor, photonics, optoelectronics, or compound semiconductor wafer fabrication environment preferred.
- Hands-on experience with photoresist coat/develop track systems, contact/proximity mask aligners and/or steppers, and associated exposure/develop process controls.
- Proficient in CD measurement (CD-SEM/optical) and overlay metrology, with the ability to set and hold CD, overlay, and sidewall profile specifications.
- Working knowledge of photoresist chemistries (positive/negative tone), adhesion promoters (e.g., HMDS), and their interaction with different substrate/metal surfaces.
- Experience with mask/reticle design review, mask specifications, and defect/particle control in a cleanroom environment. Familiarity with lift-off lithography processes for metal patterning is an advantage.
- Competent in SPC, DOE, and 8D/root cause methodology. Good leadership and cross-functional communication skills.
- Experience with compound semiconductor (III-V) processes and photonics device fabrication is an advantage..